Spintrac Systems, Inc., a Silicon Valley-based manufacturer of photoresist spin coater and developer systems, has received a repeat order from a key U.S. customer for its automated, cost-efficient Tractrix spin-coating system, configured to handle both 200-mm and 300-mm wafers. Custom features were specifically engineered to accommodate the customer’s needs for non-standard resist pumps, waste drain and environmental control components. In addition, to address the high cost of fab floor space, the system’s footprint was reduced to 28” x 94” (1.7 sq. m.).
Tractrix’s standard features include a proprietary linear transfer arm to transfer wafers between the front-opening shipping box (FOSB) and the process modules used in a customer’s desired process flow. Mechanical positioning systems utilising micro-stepping motors perform precise moves with minimal maintenance needs. Utilising a 15-amp brushless servo motor and Fuzzy logic bake control, exact process results are obtained with little or no calibration requirements.
“After experiencing over three years of excellent system performance, the customer came back to Spintrac Systems when they needed to add to their production capacity,” said Alan Kukas, president and CEO of Spintrac Systems.