A new series of piezo nanopositioning stages that offer sub-nanometer-level performance in compact, high-stiffness packages has been introduced by Aerotech. The new QNP-L stages are being offered in travel ranges from 100 µm to 600 µm. Their precision, frictionless flexure guidance systems assure long device life.
Economical and compact, the stages are designed for almost any laboratory or industrial application requiring precision linear motion. They provide excellent geometric performance (straightness and angular errors) while minimizing overall package size.
Applications include: Industrial and Academic Laboratories; Nanometrology; Microscopy ; Semiconductors; Microelectronics; Test & Inspection; Optics; Photonics; Data Storage; Precision Mechanics ; Metals ; Life Sciences and Medical Devices.
The stages are offered with or without closed-loop feedback. Closed-loop models use a capacitive sensor design that yields sub-nanometer positioning resolution and high-positioning accuracy. The sensors directly measure the output of the positioning carriage. This enables superior linearity and positioning repeatability when compared to indirect feedback metrology techniques such as strain-gage feedback.
Open-loop models, without feedback, provide a cost-effective option for applications where absolute positioning accuracy and repeatability are not required. Vacuum-prepared versions are also available.
The QNP-series includes XY and Z stages in which common travels mount together with adapter plates.