The newly developed Si-photonics biosensor chips were develop at imec, as part of the company’s silicon photonics CMORE service. A bio-compatible passivation technology was developed on 200mm waferscale, the chips were tested in the field, and proven to meet Genalyte’s functional requirements with high yields. The chips contain up to 128 proprietary ring resonator sensors coated by Genalyte with application-specific chemistry to create very sensitive molecular detection capability. On-chip grating couplers are used to couple the infrared light from and to Genalyte’s diagnostic equipment. The successful realization of these chips again confirms that imec’s CMORE service is delivering customer chip solutions to its partners.
Imec’s silicon photonics platform allows miniaturisation of complex photonic functions on a single chip and a dense integration of photonics and electronics. The ability to use standard microelectronic CMOS manufacturing facilities and processes to realise optical functions makes silicon photonics commercially attractive because of the potential to lower manufacturing costs and increased volume production. The high quality and reproducibility of the photonic waveguides and devices with features measuring 100-500nm requiring nm-scale accuracy are the keys to high yield.